A.MuItiSpec Box & Cassette Cleaning Station
capacity roll-through design for boxes, cassettes and SMIF pods.
Automatic load sensors identify parts and in~iate proper recipe.
Dl water heater provides continuous supply.
ULPA filtered air removes moisture.
B. MultiSpec Box & Cassette Cleaner (MS-276)
unit handles boxes and cassettes up to 200mm.
Single batch process
is perfect for smaller tabs.
Injection and bi-directional rotation for maximum cleaning power.
Heated lid speeds
Tubes are filled
and overflow in a cascade of cleaning power.
C. MuItiSpec Box & Cassette Cleaner (MS-280)
costs by 80%.
allows loading and unloading from the cleanroom.
reduces total floor space by 60%.
HEPA filtered air directed throughout the process chamber to speed
NEWS: Poly-Flow has acquired the Entegris range of automated box and wafer carrier cleaners. Details will appear here soon. Call 0141 550 2378 for more information.