A. Spray Deposition Parts Cleaner (S-525)
Drastically reduce the process time of high volume aluminum deposition
systems planetaries and shields.
Fully automatic system requires 115 the etching solution of a manual
stripping is more efficient and cost effective with high velocity
spray etch method.
B. 1-5 Metal Shield Cleaner (S-1235)
performance cleaning for Applied Materials Anelva and Endura single
wafer thin film shields.
sink independently blends its own cleaning mixtures from any bulk
chemical delivery system.
with tough H6 building codes with no storage tanks required.
C. 1-200 Immersion Deposition Parts Cleaner
your process for cleaning metals off metal fixtures and chambers.
process sinks plus three on-board storage tanks.
for most common deposition/fixture combinations
including preheated solutions or chilled process sinks.
requirements for Varian 3290, Applied Materials Endura or other popular
D. 1-300 Immersion Deposition Parts Cleaner
sinks and four on-board chemical solution tanks.
blending in the sinks for Ti and TiW removal.
Each storage tank
is equipped with a dedicated pump and aspirator.
Process and safely
functions are controlled via PCMS.