VDF Quartzware Oven (S-1509-2)
Increase furnace throughput with a pre-diffusion bake of VDF tubes,
boats and accessories.
furnace through put with a pre-diffusion bake of VDF tubes, boats
Large capacity holds 8 tubes and 8 boats per cycle.
Twin rotatable carousels for easy access to the quartz tube and boats.
150° C dry cycle, 190° C desorption cycle, 40°' C stand-by.
Looking for a "pre-diffusion' bake for
quartzware prior to the diffusion process in your furnaces, and/or
a way to quickly and completely dry the quartzware after a wet clean?
Need a way to reduce overall process time in the furnaces while
increasing throughput? Lower the C.O.O. of your furnaces via faster
Large capacity (8 tubes and 8 boats per cycle).
Adjustable shelves for peripherals.
HEPA filtered process.
150° C dry cycle.
190° C moisture bake-out cycle.
40° C stand-by.
Quick temperature ramp.
Microprocessor controlled time and temperature selections.
Electronically controlled dampers for fresh air make-up.
Insulated walls and doors.
Twin rotatable carousels for easy access to the quartz tube and
Nitrogen purging for gas ports.
Fixturing packages available for all VDF quartzware.
Fixturing packages available for all FAB parts.
Redundant over-temp controls
Exterior surface temperature remains below S2-0200 standards.
Ergonomically located controls
Watch dog circuitry
Main line lockable disconnect
Audible and visual alarms for exhaust failure
Door locked/unlocked status lights
Process doors are automatically locked above 40°C
Third party review
Dual marked for NEC and CE
300 series stainless steel cabinet inside and outside
300 series electropolished carousels & shelves
Teflon tubing & adapters for gas port injection
Power: 220 volts, 60 Hz, 1 PH (Full load 80 Amps)
Nitrogen: 30 SCFM @ 25 PSI- peak flow.
Exhaust: 100 CFM @ .75" Neg H20 (2 places)
Left to right: 86 3/8'
Front to rear: 48'
B. Acid Bottle Cleaner (S-994)
Cleans up to 18
bottles per load
Meets EPA regulations
Sloped work deck
for ergonomic loading
basket for rinsing bottle caps.
C. Acid Drum Cleaner (S-1293)
rinses 55 gallon drums for safe transport and recycling per EPA
to programmed pH value.
meets ergo requirements and aids drainage.
D. Chemical Delivery Station (S-1264)
chemicals to any Poly-Flow tool.
Designed in accordance
with applicable sections of SEMI S2-93 documents.
monitored by an on-board AutoFlow II programmable controller.
Can hold two 55
gallon Fluoropure drums in separate interlocked chambers, each with
a dedicated pumping station.
E. Dual Storage Cabinet (K-064)
furnace quartzware safely stored in all-plastic dual storage cabinet
allow access to items without unloading others.
pieces are safely stored in the specially designed drawers
Dividers are custom
engineered to fit specific quartzware.
in fire safe materials and stainless steel.
F. GSS Acid Cleaning System (S-1097)
cleaning for a wide range of sub-fab items including vacuum piping
depths reduce chemical consumption
tubing interiors with recirculating acids.
is 74" x 24" x 18" deep and is furnished with a removable
stage to raise small parts to a comfortable height.
G. IPA Blending Station (S-1114)
of DI water and IPA at factory set percentages with outstanding
tracks exact amount of IPA dispensed regardless of where it is used
in the fab.
fills 500ml and 1000ml squeeze bottles.
Fire detection protected blending chamber
H. IPA Pre-Wet Station (S-1181)
Safely and simply
pre-wet high purity wafer filter elements.
filter grid in IPA sink.
filter grid for UPW sink with PFA rinse manifold.
I. IPA Utility Sink (S-1166)
x 9" 9" cleaning sink automatically fills with dilute
x 24" x 8" rinse sink.
chamber for IPA and UPW with totalizer for IPA usage.
J. Manual Parts Clean Station (S-11226)
drop-in sinks, 24" x 24" x 18".
sink allows for mild acid cleaning.
316 ss sink handles solvent strips with ease.
and dedicated drains
Sliding deck doors
to reduce total exhaust flow
K. Solvent Pour Station (S-1572)
Designed for manual
filling of solvent bottles
grids for 500ml and 1000ml bottles
steel storage shelves
Split manual sink
L. Tube Transport Cart (S-1572)
Safely hold quartz
and silicon carbide tubes or liners from 200mm furnaces.
Dividers on lower
shelf for boats and other small items
steel with cleanroom casters and unpigmented fixturing.
will match specific load schedules.