Parts Cleaner (S-1084)
Patented turbo nozzle upblast spray for dome interior.
High purity single pas nitric acid process
Special hot UPW cycle and nitrogen purge for drying dome.
and storage rack on work deck for dome.
5:1 UPW/nitric spray cleaning and UPW rinsing for quartz domes from
the Hitachi metalization system. A custom turbo nozzle for upblast
acid and UPW spray coverage. 5:1 UPW and nitric is blended in the
holding tank. Operator programs a short spray cycle with the blended
chemical. The rotating turbo nozzle delivers a uniform pattern on
the inside of the dome. Cold UPW provides safely rinse inside and
outside of the dome; hot UPW and nitrogen purge provide for a 45
minute dry cycle. Chemical is used once and dumped to the acid waste
Keepfull BCDS interface for holding tank. Adjustable acid flow rate
to turbo nozzle. Adjustable nitrogen flow rate to turbo nozzle.
Turbo nozzle/upblast spray process. Custom fixturing for Hitachi
Special hot UPW
cycle and nitrogen purge for drying dome.
Storage rack on workdeck for dome.
Cabinet; Y2 and 3/4" Flame retardant polypropylene.
Process Chamber: Natural polypro.
Pressure piping: Natl.
PVDF & Teflon.
Chemical Holding Tank: Natl PVDF.
Drain: Natural PVDF.
Wetted Surfaces: Natural PVDF, Teflon, natural polypropylene,
Single POC for acid holding tank. External connections for ready
signal, demand signal, BCDS ready signal and EMO contact.
48.5" l to r, 48" f to r, 86" tall.
18" l to r, 18" f to r, 12" deep.
Holding Tank Size:
Acid Waste Drain (single POC)
POC rear through floor.
rear bottom of tool.
Main power: rear
UVIR power: rear
Exhaust: top connection
B. Centura Parts Cleaner (S-1243)
Extra capacity sink holds three sets of chambers and assorted quartzware.
Specially designed fixtures keep them in place to avoid breakage
and ensure proper drainage.
clean is performed in a sealed chamber to minimize exhaust.
C. Centura Q/S Parts Cleaner (S-1261)
Dual purpose unit cleans both quartz and stainless items
Immersion process with a strong HF mixture deep cleans while a spray
etch with a dilute HF gives a final polish etch.
Separate dedicated cleaning sink is furnished to handle the stainless
steel exhaust lines.
D. Exhaust I.ine Rinse
Removes built-up deposits and condensation
Rotating cabinet rinse spray bars
Small front-to-rear footprint saves valuable floor space.
E. GaSonics Parts Cleaner
Twin sinks (28" X 24" X 18") handle the full range of parts for
Sinks programmably fill with blended ratios of HF and deionized
Multiple dump rinse cycles ensure thorough rinsing.
Ergonomic 5-8 compliant package features automatic lids.