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Pyrotron - UV Detector
Flame Detector in Diffusion Furnace Tubes - The Ultimate Clean Room Safety Device.

Advantages
Sensitive and fast detection of different types of gases and chemicals.
"Sun blind" sensor installs at the tube source.
Specific flame wave length detection is 180nm.
Easily adaptable to different quartz fittings

Description
Senses harmful gas leaks in the wafer process.
Ensures flame operation inside the tube - automatic process shut off if no flame detected.
Pyrotron controller interfaces with the furnace controller and is connected to H2 or chemical source carrier gas.