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High Temperature Recirculating Bath
The Modutek QFa Series of High Temperature Recirculating Baths is the result of almost 20 years of evolutionary bath design and a passion for establishing the quality standard in quartz baths. At Modutek, we define quality by the degree of safety, reliability, and cost of ownership. These values are engineered into every aspect of our products.

The Modutek QFa Series of High Temperature Recirculating Baths is the result of almost 20 years of evolutionary bath design and a passion for establishing the quality standard in quartz baths. At Modutek, we define quality by the degree of safety, reliability, and cost of ownership integrated into every aspect of our baths.

 Features Benefits
Nested 4-sided heating element Faster, more even heating
360° serrated overflow weir Facilitates laminar flow while minimizing particulate contamination
Dual safety snap switch Minimizes damages resulting from runaway temperatures
Seamless, sloped flange design Improves uptime and reliability due to longer vessel life


 Materials of Construction

Process Vessel Semiconductor grade, flame-polished, quartz
Housing UL-94 VO rated FRPP
Insulation High density alumina silica fiber rated to 1260° C


 System Specifications

Applications Etching, Stripping, Cleaning
Chemical usage H2SO4, H2O2, HCl, etc.
Operating temperature range 30° - 180° C
Process temperature control ± 1° C (depends on controller and process)
Heat-up rate 2° C per minute (rate affected by size of system, fluid, etc.)
Circulating fluid inlet/outlet ¾" Male Flaretek


 Facility Requirements

Electrical 208VAC, 50/60Hz, 1Ø (Current requirements depend on bath size)

Options
Modutek C1915a Process Temperature Controller
Inline infrared heater
Liquid Level Sensor
Process Thermocouple
Quartz Diffuser Plate
Autolid
Custom vessel sizes



 Model Model Deck Cutout
L x W x D (in)
Deck Area
L x W (in)
Vessel
L x W x H (in)
QFa16 13.88 x 12.63 x 16.00 15.63 x 14.38 7.75 x 7.75 x 9.00
QFa18 18.38 x 16.13 x 17.38 20.13 x 17.88 12.00 x 11.00 x 10.50
QFa24 17.63 x 12.38 x 13.25 19.38 x 14.13 11.50 x 7.50 x 7.00
QFa25 19.63 x 12.38 x 14.25 21.38 x 14.13 13.50 x 7.50 x 8.00
QFa26 22.25 x 13.00 x 16.00 24.00 x 14.75 16.00 x 8.00 x 9.00
QFa28 27.88 x 16.63 x 17.38 29.63 x 18.38 21.50 x 11.50 x 10.50

For more information on Modutek product lines visit their website at http://www.modutek.com