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Indirect Megasonic Systems
Indirect Megasonic SystemsThe MSI Series of Indirect Megasonic Systems offers the newest and best choice for semiconductor wafer, hard disk and flat panel cleaning, etch and strip applications. In head-to-head tests with other Megasonic brands, Modutek's MSI Series comes out on top. Modutek's MSI Series has the ability to remove tough 0.1µm particles and operate at temperatures up to 160°C.

The Modutek MSI Series of Indirect Megasonic Systems offers the newest and best choice for semiconductor wafer, hard disk, and flat panel cleaning, etch, and strip applications. In head-to-head tests with other megasonic brands, Modutek’s MSI Series consistantly comes out on top. With the ability to remove those tough 0.1m m particles and operate at temperatures up to 160° C, you can be sure that your process will turn out a quality product time and time again.

Applications
Cleaning
Etch
Strip

 Materials of Construction

Inner Vessel GE124 Quartz
Outer Vessel NPP, PVDF, or electropolished 316SS
Process Fittings Quartz & Teflon Flaretek style

Other materials available upon request



 System Specifications

Operating Temp up to 160° C
Particle Removal to 0.1m
Transducers Number required depends on configuration
Individual transducers rated up to 300W each


 Configuration

Style Overflow/Recirculating
Quick Dump Rinsers
Static
Standard Sizes single and dual 150mm
single and dual 200mm
single 300mm

Custom Sizes Available



For more information on Modutek product lines visit their website at http://www.modutek.com