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Direct Megasonic System - MSD Series
The Modutek MSD Series of Direct Megasonic Systems offers the newest and best choice for semiconductor wafer, hard disk, and flat panel cleaning, etch and strip applications. With the industry's only Teflon-coated transducer plate and Modutek's MSD Series goes where no one else can!  MSD Series has the ability to remove particles down to 0.1µm.

The Modutek MSD Series of Direct Megasonic Systems offers the newest and best choice for semiconductor wafer, hard disk, and flat panel cleaning, etch, and strip applications. With the industry’s only Teflon-coated transducer plate, Modutek’s MSD Series goes where no one else can! In head-to-head tests with other megasonic brands, Modutek’s MSD Series consistantly comes out on top. With the ability to remove those tough 0.1m m particles you can be sure that your process will turn out a quality product time and time again.

Applications
Cleaning
Etch
Strip

 Materials of Construction

Process Vessel NPP, PVDF, or electropolished 316SS

Other materials available upon request



 System Specifications

Operating Temp up to 70° C
Particle Removal to 0.1m m
Transducers Number required depends on configuration
Individual transducers rated up to 300W each

Transducer Examples:

1 x 150mm uses 4 transducers
1 x 200mm uses 6 transducers


Configuration

Style Overflow/Recirculating
Quick Dump Rinsers
Static
Standard Sizes single and dual 150mm
single and dual 200mm
single 300mm

Custom Sizes Available




For more information on Modutek product lines visit their website at http://www.modutek.com