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F Series Filtered Etch
F Series Filtered EtchThe MODUBATH®  F Series will significantly reduce acid consumption while providing continuous 1.0 to 0.2 micron filtration for reduced particle count & improved yields. The F Series maintains ±1°C control; 0.4°C under certain conditions. The F Series offers many available options to match your process needs.

Filtered Recirculating Bath
The Modutek F Series of Filtered Recirculating Baths is our time tested solution to providing continuous filtration while reducing acid consumption in your positive resist developing and filtered etch processes. A low-cost of ownership has been engineered into every detail of our filter etch bath, making it one of our most consistent performers and a true asset to our many satisfied customers.

Etching and Positive Resist Developing

 Features Benefits
360° serrated overflow weir Helps to efficiently remove particulates which improve yields
Uniform flow return system Creates consistent laminar flow across every wafer for consistent process results

 System Specifications

Operating Range l model - 10-60° C
h model - 10-80° C
Temperature Control ± 1.0° C (depending on controller)
Bath Liquid Stability Internal gradients ± 0.5° C

 Facility Requirements

Electrical 120VAC, 50/60Hz, 1Ø , 2A

 Materials of Construction

Process Module NPP (l model) or PVDF (h model)
Pump/Filter Housing NPP (l model) or PVDF (h model)
Temperature Control Coils PFA
O-Rings Viton (standard, other materials available)
Drain Valve Teflon
Cover Clear PVC

RCe Series Temperature Control Recirculator
C21b Process Controller/Timer
Nitrogen Manifold System
1/3hp or 1/2hp pump motor
Stainless Steel construction
Flow Sensor

 Model Inside Dimension (ID)
L x W x D (in)
Deck Cutout
L x W x D (in)
Deck Area
L x W (in)
F16 7.88 x 7.88 x 7.25 15.50 x 10.13 x 16.75 17.25 x 12.75
F18 11.50 x 10.50 x 11.50 20.63 x 15.50 x 17.25 22.75 x 18.25
F24 11.00 x 7.50 x 7.25 18.50 x 10.0 x 16.25 20.25 x 12.75
F25 13.00 x 7.50 x 7.25 20.25 x 10.75 x 16.75 22.00 x 12.75
F26 15.50 x 7.50 x 7.25 23.75 x 10.00 x 16.75 25.50 x 12.25
F28 21.50 x 11.50 x 11.50 28.75 x 15.50 x 17.25 31.00 x 18.25

For more information on Modutek product lines visit their website at http://www.modutek.com