will tailor your CSM/Win Semiconductor Measurement System for your
exact requirements. Choose from the best capacitance meters and probe
stations to suit your specific need. All CSM/Win Systems are rackmounted
in a tabletop enclosure or stainless steel workstation.
MDC offers the latest instruments from Hewlett-Packard, Keithley,
and Boonton to match every easurement need from routine production
to advanced research. See the current MDC Capacitance Meter Guide
for a complete list of specifications and voltage ranges.
MDC can integrate different probe stations suitable for production,
engineering, or research applications. See individual data sheets
for more details.
1. The Autoloading Hot Chuck System is the fastest way to
measure multiple wafers or qualify multiple furnaces. The cassette
loaded, SMIF-compatible unit can quickly remove a wafer from the
cassette, align, and load it on the hot chuck. After the measurement,
the wafer is removed from the chuck, cooled, and reloaded in the
2. The QuietCHUCK Hot Chuck System
is a complete hot chuck package for mobile ion measurements by conventional
bias-temperature stress technique (CVBT) or triangular voltage sweep
method (TVS). The MDC QuietCHUCK System uses a DC powered hot chuck
controller for minimum induced noise. The CSM/Win System can control
and monitor all stress parameters. Multiplexing of up to 10 probes
3. The DuoCHUCK Integrated Hot Chuck
System is designed for high throughput CVBT mobile ion tests. It
contains two separate hot chucks and all associated control, multiplexing,
and stress bias circuitry. It is possible to make measurements on
from one to five C-V dots on each chuck. The DuoCHUCK has close
to 10 times the capacity of a conventional single dot probe station.
4. Probers allow for multiple site
measurements. This facilitates mapping of parameters like Vfb, lifetime,
breakdown voltage, Qbd, or interface trap density Special prober
software includes expanded multiple test menus, data storage, and
5. Mercury Probes are used for temporary,
non-destructive contact to MOS and bare semiconductor samples at
room temperature. They are excellent for monitoring wafer doping
and resistivity Mercury probes work well with GaAs and GaP material.
The probes work in both front-front and front-back contact configurations.
6. Multiplexers are computer-controlled
switches that improve the efficiency of CSM/Win Measurement Systems.
They allow a capacitance meter to measure several points on a wafer
or on several wafers. Also they allow a CSM/Win System to switch
automatically between different instruments so that a sequence of
tests can be performed without the need to switch cables manually.
For more information on MDC product lines
visit their website at http://www.mdc4cv.com