Model AGT354C Chiller/Heater Recirculator
|Accurate Gas Control Systems
AGT354C Chiller/Heater RecirculatorTypical Applications Include:
Gas Cylinder Jackets
Wet Etch Stations
||0°C to 75°C
||250 W @ 4°C
|(Ambient = 20°C)
||675 W @ 20°C
||10.5 LPM (2.8GPM)
|Electrical Circuit Requirements:
||115V, 60 Hz, 30A, 1Ph
||230V, 50 Hz, 15A, 1Ph
||12 litres (3.2 gals)
|Dimensions (H x W x D)
||29" x 17" x 17"
| No Flow Switch
| Communications Package:
||RS485 and RS232
| Audible Hi/Low Temperature Alarm
| 4-20 mA Temperature Output
The AGT354C Recirculator contains an environmentally
friendly non-CFC refrigeration system, a high output heater, and
positive displacement pump. Accurate and stable (+-.1oC) tempertaure
control is achieved by modulating the net cooling power via a digitally
controlled heater and a large reservoir serving as a thermal flywheel.
The reservoir is easily accessible for filling purposes and checking
The AGT -Series Recirculators are capable of removing
or adding heat to a remote source by regulating and controlling
a wide range of temperatures of a Closed-Loop circulating liquid.
Wasting of water is eliminated with use of the AGT Recirculators
when connected to Cylinder Gas Sources.
Common applications include Temperature Control
for ETCH and CVD Process Gases, Vacuum Pumps, Reactor Flanges, MFC's,
Power Supplies, Condensers, and Turn-Key Gas Delivery Systems. The
AGT -Series Recirculators in conjunction with the AG-J Heat Exchange
Jackets regulate and control temperatures of Gases contained in
any size or type cylinder.